POU 3500 Thermoelectric TCS

An ideal solution for Etch applications
3500 Point of Use Thermoelectric Temperature Control System
Item Number: 
3500
Product Category: 

POU 3500 Point-of-Use Thermoelectric Temperature Control Systems are ideal solutions for Etch applications that employ high average RF power (heat loads) and/or low wafer temperatures (e.g.: RF Power >2kW, set-point temperature).

The 3500 system preserves the POU small form factor, and, is the choice for today’s most demanding 200mm & 300mm Etch processes.

Specifications

Temperature Range: 
-20 to 90 °C
Cooling Capacity: 
2500 W at 20 °C
Process Cooling Fluid Flow: 
4 GPM at 30 psig
Height: 
54.4 cm
Width: 
19.4 cm
Depth: 
30 cm
Weight: 
38 kg
84 lb