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POU Chiller Power Savings

The LAUDA-Noah POU chiller, by design, utilizes an average of 50% less power than compressor based units. Having only one moving part, the LAUDA-Noah POU chiller only consumes power when under a load. When installed and optimized, a LAUDA-Noah POU system will operate at ~20-30% of its peak power consumption, offering our customers significant reduction in operating costs and increased reliability.

The data set here is from a 200mm volume production wafer fab and clearly illustrates the benefit of the LAUDA-Noah POU system.

Power Savings
Etch Platform