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RMA Request Form
Upon receipt of this form, you will be provided the warranty status of the failed unit and an RMA#. LAUDA-Noah requires a purchase order prior to shipping any exchange, regardless of warranty status or repair option choice.
If you are a human, ignore this field
Country *
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Afghanistan
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Customer Name *
Fab Name *
Contact *
Email Address *
Phone Number
Model *
- Select -
POU3300
POU3500
S1200
S2400
S4400
PSC1200
PSC2400
PSC4400
PSC2
4400
8800
Analog RCM
RCM2
RCMT
RCMe
RCM-PM2
RCM-PM4
TMO8
TMO10
TMO500
Other
Serial Number (Only 1 per request) *
Tool OEM & Platform
- None -
Aixtron
AMAT Centura
AMAT Centura_2
AMAT Centura_300mm
AMAT Endura
AMAT Endura_300mm
AMAT P5000
Hitachi
Lam Standalone
Lam Alliance
Lam 2300
Mattson Alpine
Mattson Aspen_II
Mattson Aspen_III
Novellus PEP
Novellus Sierra
Semitool
Tegal
TEL Unity II
TEL Unity IIe
TEL Unity M
TEL Unity Me
TEL TELIUS
Trikon Planar FXP
Ulvac
Varian
Other
Tool ID
Chamber Type
- None -
4400
4500
4700
9100
9400
9600
ASP
ASP+
Cu Sine
Cu Mete
Deep Trench
DPS Metal
DPS Poly
DPS II
DRM
eHighlands
eMAX
eMAX (CT)
eMxP
eMxP+
Enviro
Exelan
Exelan Flex
Exelan HPT
Flow Fill
HART
HART+
HIghlands
ICPsm
Iridia
Kiyo
MxP
MxP+
RPS
SCCM
SCCM_(SE)
Sierra
Star
Strip
Super e
Viista
Versys Metal
Versys Poly
Other
Chamber Position
- None -
A
B
C
D
PM1
PM2
PM3
PM4
P/C1
P/C2
P/C3
P/C4
Other
Chamber Loop
- None -
Cathode
Wall
Lower_Electrode
Upper_Electrode
Platen
Other
Original Install Date
Process Fluid
Temperature Setpoint *
Temperature Setpoint Is Unknown
Agent
Serial Number of Replacement
Failure Sympton(s) *
Action(s) Taken
Will Failure Analysis Be Required?
Yes I need analysis
No, no analysis please